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Micro-Electrical-Mechanical Systems
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Definition
: A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
Examples
Lab-On-A-Chip Devices
Other names
MEMS; Systems, Micro-
Electro-
Mechanical; Systems, Micro-
Electrical-
Mechanical; System, Micro-
Electro-
Mechanical; System, Micro-
Electrical-
Mechanical; Micro-
Electro-
Mechanical System; Micro-
Electrical-
Mechanical System; Micro Electro Mechanical Systems; Micro Electrical Mechanical Systems; Micro-
Electro-
Mechanical Systems; BioMEMS